Semiconductor
AP-1000 Plasma Treatment System
PLC controller with touch screen interface provides industrial reliability and ease of use. Complete system enclosure minimizes footprint.
FlexTRAK™ Plasma Treatment System
The FlexTRAK system offers high-throughput capability of up to 480 substrates or process carriers per hour. Its small chamber volume and proprietary process control enable unmatched short cycle times.
FlexTRAK-BH™ Plasma Treatment System
The FlexTRAK-BH system is designed for high-throughput processing of microelectronic boats, trays, or other flat device carriers, up to 2 boats per plasma cycle.
FlexTRAK-SH™ Plasma Treatment System
The universal architecture of the FlexTRAK-SH system accommodates a wide range of strip sizes in the same system, yielding unmatched production flexibility.
FlexTRAK-WR™ Plasma Treatment System
The FlexTRAK-WR plasma treatment system is designed for
high-throughput processing of semiconductor wafers up to
300mm
(12 in.).
XTRAK Plasma Treatment System
With process capability of up to 180 substrates or carriers per hour, the system's Smart Tune™ management system provides closed-loop control that reduces tuning to less than one second.
PX-Series Plasma Treatment System
PX-Series systems are equipped with an automatic impedance matching network for ease of operation and consistent results.
Anisotropic RIE Plasma Systems
The CS-1701 system is excellent for metal etching, silicide etching and etching of III-V compounds, anisotropic etching of nitrides, oxides and polyimides.
PM-100 Plasma Treatment System
Designed to be a low-cost, highly effective plasma treatment solution for treating electronic components, printed circuit boards, and medical & life science devices.
Medical Device
FlexTRAK Plasma Treatment System
The FlexTRAK's universal architecture makes it an ideal plasma processing solution for lean medical manufacturing environments.
C-Series Plasma Treatment System
The C-Series systems accommodate a wide variety of products and process capabilities with a vacuum chamber sized to meet specific customer product and production requirements.
AP-1000 Plasma Treatment System
Flexible shelf architecture allows processing of a wide variety of parts in either direct or downstream plasma or deposition mode.
PX-Series Plasma Treatment System
PX-Series systems are equipped with an automatic impedance matching network for ease of operation and consistent results.
PM-100 Plasma Treatment System
Designed to be a low-cost, highly effective plasma treatment solution for treating electronic components, printed circuit boards, and medical & life science devices.
Printed Circuit Board
FP64 Plasma Treatment System
FP64 systems are specifically configured to meet PCB flex panel production requirements.
PROVIA™ Plasma Treatment System
The PROVIA™ System is specifically configured to meet the demands of today’s PCB Manufacturing Operations.
PCB Series Plasma Treatment Systems
PCB series are robust, flexible plasma systems that meet the rigorous demands of 24-hour operation in any PCB manufacturing environment.
VSS Vacuum Storage System
Vacuum Storage Systems. Commercial or Mil-Spec PCB manufacturers benefit from vacuum prepreg stabilizing and conditioning.
Industrial
C-Series Plasma Treatment System
PLC controller with touch screen interface provides industrial reliability and ease of use. Complete system enclosure minimizes footprint.
R-Series Plasma Treatment System
The R-Series can accommodate webs up to 1800mm width and any production length.
Semiconductor
The Semiconductor Business Group focuses on plasma processes for advanced semiconductor packaging and assembly (ASPA), wafer level packaging (WLP), microelectromechanical systems (MEMS), data storage devices such as thin film read-write heads (TFH) for hard disk drives, and images sensors. More>>>
Medical Device
The Medical Device Business Group is engaged in providing enhanced product performance, more reliable devices and lower cost processes to companies who manufacture leading edge medical devices including cardiac rhythm management products, catheters, stents, ocular devices, and filter media.
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Printed Circuit Board
Printed circuit board manufacturers work with our PCB Business Group due to the implementation of new materials technology, and smaller geometries in HDI, flex, and rigid flex applications. More>>>